Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation

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Collisionless heating in capacitive discharges enhanced by dual-frequency excitation.

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ژورنال

عنوان ژورنال: Physical Review Letters

سال: 2006

ISSN: 0031-9007,1079-7114

DOI: 10.1103/physrevlett.96.205001